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Module Detailed Information for [CN4223R]
Academic Year : 2018/2019 Semester : 2
Correct as at 14 Dec 2018 20:00

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Module Information
Module Code :
CN4223R IVLE LumiNUS
Module Title : Microelectronic Thin Films
Module Description : This module provides students with a working knowledge of thin film technology as this is applicable in the microelectronics industry. The emphasis is on the role of chemical and engineering science in materials processing. The module commences with an introduction to basic concepts in the kinetic theory of gases, thin film formation, vacuum technology and surface preparation. The next section covers a variety of thin film deposition techniques – physical as well as chemical. Thin film processing and patterning is the next subject of discussion. In particular, process operations relevant to semi-conductor device manufacture are covered. Diagnostics and characterisation of thin films is also presented with a view to familiarise students in state-of-the-art methodologies. The last part is devoted to an intensive study of thin film phenomena from a materials perspective. This module is targeted at level 4 chemical engineering students.
Module Examinable : -
Exam Date : 07-05-2019 PM
Modular Credits : 4
Pre-requisite : MLE1101 or EE2004 or EE3431C (MICROELECTRONICS MATERIALS AND DEVICES)
Preclusion : Nil
Module Workload (A-B-C-D-E)* : 3-1-0-0-6
Remarks : Nil
* A: no. of lecture hours per week
B: no. of tutorial hours per week
C: no. of laboratory hours per week
D: no. of hours for projects, assignments, fieldwork etc per week
E: no. of hours for preparatory work by a student per week


Lecture Time Table
Class TypeWeek TypeWeek DayStartEndRoom
1 LECTUREEVERY WEEKFRIDAY18002100E5-03-19,

Tutorial Time Table
Attention: The tutorial timetables could be updated from time to time. Students are advised to check regularly for the latest update on the change of tutorial timing.
Class TypeWeek TypeWeek DayStartEndRoom Iteration
1 TUTORIALEVERY WEEKFRIDAY21002200E5-03-19,
Not Available in Tutorial Balloting yet.





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